Interdigitated back contact heterojunction photovoltaic device

ABSTRACT

A photovoltaic device includes a crystalline substrate having a first dopant conductivity, an interdigitated back contact and a front surface field structure. The front surface field structure includes a crystalline layer formed on the substrate and a noncrystalline layer formed on the crystalline layer. The crystalline layer and the noncrystalline layer are doped with dopants having a same dopant conductivity as the substrate. Methods are also disclosed.

RELATED APPLICATION DATA

This application is a divisional application of application Ser. No.13/763,219, entitled: “INTERDIGITATED BACK CONTACT HETEROJUNCTIONPHOTOVOLTAIC DEVICE,” filed Feb. 8, 2013 and incorporated herein byreference.

BACKGROUND

1. Technical Field

The present invention relates to photovoltaic devices and fabricationmethods, and more particularly to a front surface field junction forinterdigitated back contact devices.

2. Description of the Related Art

Inter-digitated back-contact (IBC) solar cell structures are of interestfor increasing short circuit current (J_(sc)) (and therefore efficiency)of the solar cells by forming both an emitter junction, a back surfacefield (BSF) junction and the associated metallization on a backside ofthe solar cell. This permits sunlight to enter from a front side withminimum shadowing loss. In the case of heterojunction (HJ) solar cells,hydrogenated amorphous silicon (a-Si:H) containing material may beemployed to form a front surface field (FSF) in addition to forming theemitter and/or BSF junctions. Such a FSF junction is typically formed byusing an intrinsic (i) a-Si:H layer to passivate the front surface of acrystalline silicon (c-Si) substrate, followed by a doped a-Si:H layerhaving the same conductivity type as that of the c-Si substrate. In thisway, the intrinsic layer is sandwiched between the c-Si substrate andthe doped a-Si layer, and the c-Si substrate and the doped a-Si layerhave a same dopant conductivity type.

The doped a-Si layer provides an electric field to repel minoritycarriers generated in the c-Si substrate from the front surface of thec-Si substrate thus reducing carrier recombination at the front surfaceof the c-Si substrate. In some instances, the doped a-Si:H containingmaterial may be omitted. In such cases, the presence of the intrinsicand/or doped a-Si:H containing material at the front surface results insome absorption loss reducing the short circuit current of the solarcell accordingly. This is because a-Si:H and related alloys are directbandgap materials, and, therefore, light absorption in these materialsis strong. Due to the presence of a large density of defects in thesematerials, diffusion length of minority carriers in these materials issmall and therefore a significant portion of the photogenerated carriersin these materials is lost by recombination prior to reaching the c-Sisubstrate.

SUMMARY

A photovoltaic device includes a crystalline substrate having a firstdopant conductivity, an interdigitated back contact and a front surfacefield structure. The front surface field structure includes acrystalline layer formed on the substrate and a noncrystalline layerformed on the crystalline layer. The crystalline layer and thenoncrystalline layer are doped with dopants having a same dopantconductivity as the substrate.

Another photovoltaic device includes a Si-containing crystallinesubstrate having a first dopant conductivity and an interdigitated backcontact having back surface field stacks and emitter stacks. A frontsurface field structure includes a hydrogenated Si-containingcrystalline layer formed on the substrate and a hydrogenatedSi-containing noncrystalline layer formed on the crystalline layer. Thecrystalline layer and the noncrystalline layer are doped with dopantshaving a same dopant conductivity as that of the substrate, thecrystalline layer having a thickness less than a diffusion length ofminority carriers in the crystalline layer.

A method for forming a photovoltaic device includes forming aninterdigitated back contact on a crystalline substrate having a firstdopant conductivity; and forming a front surface field structure on thesubstrate by: forming a crystalline layer on the substrate; and formingan amorphous layer on the crystalline layer, the crystalline layer andthe noncrystalline layer being doped with dopants having a same dopantconductivity as the substrate.

These and other features and advantages will become apparent from thefollowing detailed description of illustrative embodiments thereof,which is to be read in connection with the accompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

The disclosure will provide details in the following description ofpreferred embodiments with reference to the following figures wherein:

FIG. 1A is a cross-sectional view of a photovoltaic device having afront surface field contact with an n-doped crystalline layer and ann-doped noncrystalline layer, and an interdigitated back contact inaccordance with one embodiment;

FIG. 1B is a cross-sectional view of a photovoltaic device having afront surface field contact with a p-doped crystalline layer and ap-doped noncrystalline layer, and an interdigitated back contact inaccordance with one embodiment;

FIG. 2A is a cross-sectional view of the photovoltaic device of FIG. 1Ahaving the interdigitated back contact including an interlayer between ap-doped layer and a transparent electrode in accordance with oneembodiment;

FIG. 2B is a cross-sectional view of the photovoltaic device of FIG. 1Bhaving the interdigitated back surface field contact including aninterlayer between a p-doped layer and a transparent electrode inaccordance with one embodiment;

FIG. 3A is a cross-sectional view of the photovoltaic device of FIG. 2Ahaving the interdigitated back contact including another p-doped layerformed on the interlayer in accordance with one embodiment;

FIG. 3B is a cross-sectional view of the photovoltaic device of FIG. 2Bhaving the interdigitated back contact including another p-doped layerformed on the interlayer in accordance with one embodiment;

FIG. 4A is a cross-sectional view of the photovoltaic device of FIG. 1Ahaving the interdigitated back contact including an n-doped crystallinelayer in contact with the substrate in accordance with one embodiment;

FIG. 4B is a cross-sectional view of the photovoltaic device of FIG. 1Bhaving the interdigitated back contact including an n-doped crystallinelayer in contact with the substrate in accordance with one embodiment;

FIG. 5A is a cross-sectional view of a photovoltaic device having afront surface field contact with an n-doped crystalline layer and ann-doped noncrystalline layer, and an interdigitated back contactincluding an interlayer between a p-doped layer and a transparentelectrode and an n-doped crystalline layer in contact with the substratein accordance with one embodiment;

FIG. 5B is a cross-sectional view of a photovoltaic device having afront contact with a p-doped crystalline layer and a p-dopednoncrystalline layer, and an interdigitated back surface field contactincluding an interlayer between a p-doped layer and a transparentelectrode and an n-doped crystalline layer in contact with the substratein accordance with one embodiment;

FIG. 6A is a cross-sectional view of a photovoltaic device having afront surface field contact with an n-doped crystalline layer and ann-doped noncrystalline layer, and an interdigitated back contactincluding a second p-doped layer formed on an interlayer between a firstp-doped layer and a transparent electrode and an n-doped crystallinelayer in contact with the substrate in accordance with one embodiment;

FIG. 6B is a cross-sectional view of a photovoltaic device having afront surface field contact with a p-doped crystalline layer and ap-doped noncrystalline layer, and an interdigitated back contactincluding a second p-doped layer formed on an interlayer between a firstp-doped layer and a transparent electrode and an n-doped crystallinelayer in contact with the substrate in accordance with one embodiment;

FIG. 7 shows a graph and a test structure showing a relationship betweenthicknesses of an n-doped crystalline layer and an n-dopednoncrystalline layer on an n-doped substrate for a front surface fieldcontact in accordance with the present principles; and

FIG. 8 is a block/flow diagram showing a method for making photovoltaicdevices in accordance with illustrative embodiments.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

In accordance with the present principles, inter-digitated back-contactphotovoltaic devices and methods for fabrication are provided. Thephotovoltaic devices include a front surface field (FSF) junction havinga crystalline layer and a noncrystalline layer formed on a crystallinesubstrate. The crystalline layer, noncrystalline layer and substratehave a same dopant conductivity. In one embodiment, the crystallinelayer includes hydrogenated crystalline Si (c-Si:H) having the sameconductivity type as that of the substrate. The substrate may includec-Si, and the noncrystalline layer may include a hydrogenatednon-crystalline material, which is either intrinsic or has the sameconductivity type as that of the crystalline layer (doped c-Si:H) andthe substrate (c-Si).

In one embodiment, the crystalline layer is thinner than a diffusionlength of minority carriers in the crystalline layer, and has a higherdoping than that of the substrate. The crystalline layer may behydrogenated Si (c-Si:H) and include between about 5-40 atomic %hydrogen.

It is to be understood that the present invention will be described interms of a given illustrative architecture having illustrativesubstrates and photovoltaic stacks; however, other architectures,structures, substrates, materials and process features and steps may bevaried within the scope of the present invention.

It will also be understood that when an element such as a layer, regionor substrate is referred to as being “on” or “over” another element, itcan be directly on the other element or intervening elements may also bepresent. In contrast, when an element is referred to as being “directlyon” or “directly over” another element, there are no interveningelements present. It will also be understood that when an element isreferred to as being “connected” or “coupled” to another element, it canbe directly connected or coupled to the other element or interveningelements may be present. In contrast, when an element is referred to asbeing “directly connected” or “directly coupled” to another element,there are no intervening elements present.

A design for a photovoltaic device may be created for integrated circuitintegration or may be combined with components on a printed circuitboard. The circuit/board may be embodied in a graphical computerprogramming language, and stored in a computer storage medium (such as adisk, tape, physical hard drive, or virtual hard drive such as in astorage access network). If the designer does not fabricate chips or thephotolithographic masks used to fabricate chips or photovoltaic devices,the designer may transmit the resulting design by physical means (e.g.,by providing a copy of the storage medium storing the design) orelectronically (e.g., through the Internet) to such entities, directlyor indirectly. The stored design is then converted into the appropriateformat (e.g., GDSII) for the fabrication of photolithographic masks,which typically include multiple copies of the chip design in questionthat are to be formed on a wafer. The photolithographic masks areutilized to define areas of the wafer (and/or the layers thereon) to beetched or otherwise processed.

Methods as described herein may be used in the fabrication ofphotovoltaic devices and/or integrated circuit chips with photovoltaicdevices. The resulting devices/chips can be distributed by thefabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged devices/chips), as a bare die, or in a packagedform. In the latter case, the device/chip is mounted in a single chippackage (such as a plastic carrier, with leads that are affixed to amotherboard or other higher level carrier) or in a multichip package(such as a ceramic carrier that has either or both surfaceinterconnections or buried interconnections). In any case, thedevices/chips are then integrated with other chips, discrete circuitelements, and/or other signal processing devices as part of either (a)an intermediate product, such as a motherboard, or (b) an end product.The end product can be any product that includes integrated circuitchips, ranging from toys, energy collectors, solar devices and otherapplications including computer products or devices having a display, akeyboard or other input device, and a central processor. Thephotovoltaic devices described herein are particularly useful for solarcells or panels employed to provide power to electronic devices, homes,buildings, vehicles, etc.

It should also be understood that material compounds will be describedin terms of listed elements, e.g., SiC or SiGe. These compounds includedifferent proportions of the elements within the compound, e.g., SiCincludes Si_(x)C_(1-x) where x is less than or equal to 1, or SiGeincludes Si_(x)Ge_(1-x) where x is less than or equal to 1, etc. Inaddition, other elements may be included in the compound, such as, e.g.,dopants, hydrogen, etc. and still function in accordance with thepresent principles. The compounds with additional elements may bereferred to herein as alloys.

The present embodiments may be part of a photovoltaic device or circuit,and the circuits as described herein may be part of a design for anintegrated circuit chip, a solar cell, a light sensitive device, etc.The photovoltaic device may be a large scale device on the order of feetor meters in length and/or width, or may be a small scale device for usein calculators, solar powered lights, etc.

Reference in the specification to “one embodiment” or “an embodiment” ofthe present principles, as well as other variations thereof, means thata particular feature, structure, characteristic, and so forth describedin connection with the embodiment is included in at least one embodimentof the present principles. Thus, the appearances of the phrase “in oneembodiment” or “in an embodiment”, as well any other variations,appearing in various places throughout the specification are notnecessarily all referring to the same embodiment.

It is to be appreciated that the use of any of the following “/”,“and/or”, and “at least one of”, for example, in the cases of “A/B”, “Aand/or B” and “at least one of A and B”, is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of both options (A andB). As a further example, in the cases of “A, B, and/or C” and “at leastone of A, B, and C”, such phrasing is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of the third listedoption (C) only, or the selection of the first and the second listedoptions (A and B) only, or the selection of the first and third listedoptions (A and C) only, or the selection of the second and third listedoptions (B and C) only, or the selection of all three options (A and Band C). This may be extended, as readily apparent by one of ordinaryskill in this and related arts, for as many items listed.

It should be noted that the materials, material structures, dopant typesand dopant quantities indicated in the FIGS. are for ease ofreference/understanding, and are for illustrative purposes only.Referring now to the drawings in which like numerals represent the sameor similar elements and initially to FIG. 1A, a cross-section of aninterdigitated back contact (IBC) heterojunction (HJ) photovoltaic cell100 is shown in accordance with one illustrative embodiment. Cell 100includes an n-type crystalline substrate 102. In a particularly usefulembodiment, the substrate includes crystalline Si (c-Si). The cell 100includes emitter contacts or junctions 104 and back surface field (BSF)contacts or junctions 106. The junctions 104 and 106 are formed bystacks of an intrinsic (i) layer 108 (e.g., hydrogenated amorphous Si)and doped layers 112 and 114, which are respectively n+ doped and p+doped. The doped layers may include n₊ a-Si:H (112), and p₊ a-Si:H(114), respectively. An electrode 116 may include a transparentconductive oxide (TCO) material (e.g., indium-tin-oxide, aluminum dopedzinc-oxide, or other materials). The TCO material of electrode 116 mayserve to improve reflection from a back surface 118, and/or serve as abarrier against a reaction of the electrode 116 with a-Si:H of layer 112and 114 (e.g., by inter-diffusion).

A thickness of the intrinsic a-Si:H layer 108 may be in the range ofabout 3-25 nm, although thinner or thicker layers may be used. Thethickness of the doped a-Si:H layers 112 and 114 may be in the range ofabout 5-30 nm although thinner or thicker layers may be employed. Whilethe p₊ and n₊ a-Si:H regions 112 and 114 are illustrated as adjacent toeach other in the FIGS., it will appreciated by those skilled in the artthat there may be a separation or overlap between the edges of theseregions. It will also be appreciated that the thickness of the i a-Si:Hlayer 108 may be different underneath the p₊ a-Si:H regions 114 ascompared to underneath the n₊ a-Si:H regions 112, and/or compared to anyoverlapping region and/or separation between p₊ and n₊ a-Si:H regions114 and 112. It will be further appreciated that the p₊ a-Si:H layers114 may have a different thickness than the n₊ a-Si:H layers 112.

A front surface field (FSF) junction 110 is formed on a side of thesubstrate 102 opposite the emitter junctions 104 and BSF junctions 106.The FSF junction 110 includes thin continuous layers. Note that light(e.g., sunlight) enters the cell 100 from the front side, and since allthe metallization is formed on the back side of the cell 100, there isno shadowing due to the presence of a metal grid. Note also that thinnerlayers are employed for layers of the FSF junction 110 as compared tothe back side of the cell 100 to reduce absorption loss.

The FSF junction 110 includes an n₊ doped crystalline layer 120 formedon the n-type substrate 102. The crystalline layer 120 may include ahydrogenated c-Si (c-Si:H) layer. The layer 120 replaces an intrinsiclayer a-Si:H used to passivate the front surface of the c-Si substratein a conventional structure. Since the layer 120 is crystalline,absorption loss in the FSF stack is reduced by omitting intrinsic a-Si:Hfrom the FSF stack. A noncrystalline layer 122 is formed on thecrystalline layer 120. The noncrystalline layer 122 may include ahydrogenated amorphous Si (a-Si:H) layer. The layer 122 includes a samedopant conductivity as layer 120. In this embodiment, both layers 120and 122 have a same dopant conductivity as that of the substrate 102.The layers 120 and 122 (e.g., n₊ c-Si:H/n₊ a-Si:H) form a heterojunctionat the front surface.

The crystalline layer 120 may be single-crystalline or poly-crystalline.When the substrate 102 is single-crystalline (mono-crystalline), thecrystalline layer is also preferably single-crystalline, and when thesubstrate 102 is multi-crystalline, the crystalline layer 102 ispreferably poly-crystalline. The selection of the morphology is due tothe preference of growing the crystalline layer 120 on the substrate 102using a high quality, low temperature epitaxial growth process. One suchprocess is described in U.S. patent application Ser. No. 13/032,866,filed on Feb. 23, 2011, entitled “Low-Temperature Selective EpitaxialGrowth of Silicon for Device Integration”, which is incorporated hereinby reference.

The doped crystalline layer 120 forms an embedded homojunction with thesubstrate 102. In one example where the active doping level of thesubstrate 102 is in the range of 10¹⁴-5×10¹⁸ cm⁻³, the active dopinglevel of the crystalline layer 120 is in the range of 10¹⁶-3×10²⁰ cm⁻³.In another example where the active doping level of the substrate 102 isin the range of 10¹⁶-5×10¹⁷ cm⁻³, the active doping level of thecrystalline layer 120 is in the range of 10¹⁸-10²⁰ cm⁻³. A thickness ofthe doped crystalline layer 120 is less than a diffusion length ofminority carriers in the doped crystalline layer 120. In one example, ann+c-Si:H layer 120 has an active doping concentration in the range of10¹⁹-10²⁰ cm⁻³, the minority hole diffusion length in the n+c-Si:H oflayer 120 is in the range of 50 nm-2 μm, and the thickness of then+c-Si:H layer 120 is in the range of 1 nm-100 nm. In another example,the n+c-Si:H layer 120 has an active doping concentration in the rangeof 10¹⁹-10²⁰ cm⁻³, the minority hole diffusion length in the n+c-Si:Hlayer 120 is in the range of 50 nm-2 μm, and the thickness of then+c-Si:H layer is in the range of 1 nm-25 nm. In yet another example,the n+c-Si:H layer 120 has an active doping concentration of 5×10¹⁹cm⁻³, the minority hole diffusion length in the n+c-Si:H layer 120 is inthe range of 100 nm-1 μm, and the thickness of the n+c-Si:H layer is inthe range of 2 nm-15 nm. Comparable doping levels and configurations maybe provided for p-doped structures (e.g., in FIG. 1B).

Formation of the layer 120 may include employing a low temperatureplasma enhanced chemical vapor deposition (PECVD) process to epitaxiallygrow a crystalline structure on the substrate 102. The PECVD process mayemploy gas sources used for the growth of the c-Si:H layer 120, whichmay include but not are limited to SiH₄ (silane), Si₂H₄ (disilane),SiH₂Cl₂ (dichlorosilane), SiF₄ (tetrafluorosilane) precursor gas, andcombinations thereof, and H₂ carrier/dilution gas. The dilution gas toprecursor gas flow ratio may be, e.g., [H₂]/[SiH₄]>5. The dopant gases(preferably flowed in-situ) may include but are not limited to PH₃(phosphine) for n-type doping, and B₂H₆ (diborane) or TMB(tri-methyl-boron) for p-type doping. The c-Si:H layer 120 may includegermanium (Ge), nitrogen (N), oxygen (O), fluorine (F), deuterium (D),chlorine (Cl), carbon (C) or combinations thereof. The gas sourceemployed for Ge containing layers may include germane (GeH₄). The gassource used for C containing layers (e.g., if c-SiC:H is employed) mayinclude methane (CH₄), ethylene (C₂H₄), propylene (C₃H₆) but othersources (typically of the form C_(x)H_(y)) may be used as well.

A preferred technique for growing these materials is plasma-enhancedchemical vapor deposition (PECVD); however, other growth processes suchas hot-wire CVD (HWCVD) may be employed. Growth temperatures may beclose to 200° C., with highest quality films being grown at temperaturesin the range of 150-250° C.; however, growth temperatures in the rangeof room-temperature to 450° C. may be employed. The c-Si:H layer 120 mayinclude 5-40 atomic percent of hydrogen. The c-Si:H layer 120 mayinclude a thickness of about 1-25 nm, although other thicknesses may beemployed.

The surface of the doped c-Si:H layer 120 is passivated bynoncrystalline layer 122, which may include hydrogenated non-crystallineSi, which is either undoped or is doped with the same conductivity typeas that of the c-Si:H layer 120. The a-Si:H layer 122 may include 5-40atomic percent of hydrogen. The a-Si:H layer 122 may include a thicknessof about 1-25 nm, although other thicknesses may be employed.

The term “noncrystalline” indicates that the material is amorphous,nano-crystalline or micro-crystalline. The hydrogenated noncrystallinematerial may include a-Si:H, however, other materials such ashydrogenated amorphous silicon carbide (a-SiC:H), hydrogenated amorphoussilicon germanium (a-SiGe:H), or combinations thereof may be used aswell. These layers may contain nitrogen (N), oxygen (O), fluorine (F),deuterium (D), chlorine (Cl) or combinations thereof. These materialsmay also be grown by plasma-enhanced chemical vapor deposition (PECVD);however, other growth techniques known in the art, such as hot-wire CVD(HWCVD) or sputtering may be used as well. In the case of PECVD orHWCVD, the gas source used for growing Si containing layers is silane(SiH₄) although other gases such as disilane (Si₂H₆), dichlorosilane(DCS), tetrafluorosilane (SiF₄) or combinations thereof may be used aswell. These gas sources are (but not necessarily) mixed with hydrogenduring growth. The gas source used for Ge containing layers is typicallygermane (GeH₄). The gas source used for C containing layers may includemethane (CH₄), ethylene (C₂H₄), propylene (C₃H₆), but other sources(typically of the form C_(x)H_(y)) may be used as well. In-situ p-typedoping may be performed using diborane (B₂H₆) or trimethylboron (TMB)sources, and in-situ n-type doping may be performed using a phosphine(PH₃) gas source, although other dopant sources may be used as well.Ammonia (NH₃), nitrous oxide (N₂O) or other gas sources may be used fornitrogen containing layers. Carbon dioxide (CO₂), N₂O or O₂ may be usedto provide oxygen for oxygen containing layers. A carrier gas such ashydrogen (H₂), deuterium (D₂), helium (He) or argon (Ar) may be used forany or all of the layers. The carrier gas may be premixed with the gassources or flowed simultaneously with the gas source at the time ofgrowth. Growth temperatures may be close to 200° C., with highestquality films being grown at temperatures in the range of 150-250° C.;however, growth temperatures in the range of room-temperature to 450° C.may be employed.

Additional layers may be formed on the noncrystalline layer 122. Forexample, an anti-reflection coating (ARC) layer 124 may be formed on thelayer 122 from known ARC materials. The ARC layer 124 may be comprisedof a wide-bandgap material including but not limited to hydrogenatedamorphous silicon nitride (a-SiN_(x):H), hydrogenated amorphous siliconoxide (a-SiO_(x):H), hydrogenated amorphous silicon oxynitirde(a-SiN_(x)O_(y):H), amorphous aluminum oxide, amorphous zinc-oxide,amorphous tin-oxide, or combinations (composition or multi-layer)thereof. The ARC layer 124 does not need to be conductive and istypically insulating, (the main requirement is optical transparency);however, a transparent conductive material such as TCO (including butnot limited to indium-tin-oxide, Al-doped zinc-oxide, etc.) may be usedto serve as the ARC layer 124 as well.

Referring to FIG. 1B, another exemplary IBC HJ photovoltaic cell 150 ona p-type crystalline substrate 152 is illustratively shown. Thisembodiment includes a FSF structure/junction 111 similar to the FSFstructure 110 of FIG. 1A. Further, emitter contacts 144 and BSF contacts146 are similar to those in FIG. 1A, except that the emitter contacts144 include the same structure as the BSF contacts 106 (FIG. 1A), andthe BSF contacts 146 include the same structure as the emitter contacts104 (FIG. 1A) due to the doping conductivity of the c-Si substrate 152,respectively. Cell 150 includes p-type doping for the substrate 152, acrystalline layer 154 and a noncrystalline layer 156. As before, theintrinsic layer (a-Si:H) used to passivate the front surface of the c-Sisubstrate in a conventional structure is replaced with the crystallinelayer 154. The crystalline layer 154 may include a p₊ doped hydrogenatedc-Si (c-Si:H) layer. Since the p₊ c-Si:H is crystalline, absorption lossin the FSF 111 is reduced by omitting intrinsic a-Si:H. It should beunderstood that the structure, materials, doping, processing, etc. andtheir variations follow those described for FIG. 1A except the dopantconductivity of the substrate 152 is p-type in FIG. 1B.

Referring to FIG. 2A, another exemplary IBC HJ photovoltaic cell 200 isshown on an n-type c-Si substrate 102 according to another embodiment.In this embodiment, the structure of the cell 200 is the same as thestructure of cell 100 of FIG. 1A, except that emitter contacts 204include an interlayer 202 formed between the transparent electrode 116and the amorphous doped layer 114. The interlayer 202 is p₊ doped andincludes a narrow bandgap material (e.g., p₊ a-Ge:H) that is providedbetween p₊ a-Si:H 114 and TCO 116 at the emitter contacts 204 to improvecarrier transport. This may be due to the lower bandgap of a-Ge:Hcompared to a-Si:H, higher active doping of a-Ge:H compared to a-Si:H,or a combination thereof. In some embodiments, the higher active dopingof a-Ge:H is due to modulation doping of a-Ge:H. It should be understoodthat other materials may be employed for the interlayer 202 or any othercomponent.

Referring to FIG. 2B, another exemplary IBC HJ photovoltaic cell 250 isshown on a p-type c-Si substrate 102 according to another embodiment. Inthis embodiment, the structure of the cell 250 is the same as thestructure of cell 150 of FIG. 1B, except that BSF contacts 214 includean interlayer 202 formed between the transparent electrode 116 and theamorphous doped layer 114. The interlayer 202 is p₊ doped and includes anarrow bandgap material (e.g., p₊ a-Ge:H) that is provided between p₊a-Si:H 114 and TCO 116 at the emitter contacts 214 to improve carriertransport. This may be due to the lower bandgap of a-Ge:H compared toa-Si:H, higher active doping of a-Ge:H compared to a-Si:H, or acombination thereof. In some embodiments, the higher active doping ofa-Ge:H is due to modulation doping of a-Ge:H. It should be understoodthat other materials may be employed for the interlayer 202 or any othercomponent.

Referring to FIG. 3A, another exemplary IBC HJ photovoltaic cell 300 isshown on an n-type c-Si substrate 102 according to another embodiment.In this embodiment, the structure of the cell 300 is the same as thestructure of cell 200 of FIG. 2A, except that emitter contacts 304include the interlayer 202 and another amorphous layer 302 (e.g.,a-Si:H) formed between the transparent electrode 116 and the amorphousdoped layer 114. The p₊ doped interlayer 202 is comprised of a narrowbandgap material (e.g., p₊ a-Ge:H) and is inserted between two p₊ a-Si:Hlayers at the emitter contact 304 to improve carrier transport. This isdue to the lower bandgap of a-Ge:H compared to a-Si:H, higher activedoping of a-Ge:H compared to a-Si:H, or combination thereof. In someembodiments, the higher active doping of a-Ge:H is due to modulationdoping of a-Ge:H. Modulation doping may include the addition ofalternating layers of relatively wide bandgap (e.g., p⁺ a-Si:H) andrelatively narrow bandgap (e.g., p⁺ a-Ge:H) materials. It should beunderstood that other materials may be employed for the interlayer 202,layers 114 and 302 or any other component.

Referring to FIG. 3B, another exemplary IBC HJ photovoltaic cell 350 isshown on a p-type c-Si substrate 152 according to another embodiment. Inthis embodiment, the structure of the cell 350 is the same as thestructure of cell 250 of FIG. 2B, except that BSF contacts 314 includethe interlayer 202 and another amorphous layer 302 (e.g., a-Si:H) formedbetween the transparent electrode 116 and the amorphous doped layer 114.The p₊ doped interlayer 202 is comprised of a narrow bandgap material(e.g., p₊ a-Ge:H) and is inserted between two p₊ a-Si:H layers at theBSF contact 314 to improve carrier transport. This is due to the lowerbandgap of a-Ge:H compared to a-Si:H, higher active doping of a-Ge:Hcompared to a-Si:H, or combination thereof. In some embodiments, thehigher active doping of a-Ge:H is due to modulation doping of a-Ge:H.Modulation doping may include the addition of alternating layers ofrelatively wide bandgap (e.g., p⁺ a-Si:H) and relatively narrow bandgap(e.g., p⁺ a-Ge:H) materials. It should be understood that othermaterials may be employed for the interlayer 202, layers 114 and 302 orany other component.

Referring to FIG. 4A, another exemplary IBC HJ photovoltaic cell 400 isshown on an n-type c-Si substrate 102 according to another embodiment.In this embodiment, the structure of the cell 400 is the same as thestructure of cell 100 of FIG. 1A, except that BSF contacts 404 includean n-type doped crystalline layer 402 instead of the intrinsic layer108. The intrinsic layer 108 remains within the emitter contact 104 andis indicated as intrinsic layer 108′. In some embodiments, BSF contacts404 may include n₊ c-Si:H 402, n₊ a-Si:H 112, TCO 116 and back surface118. The BSF contacts 404 provide at least one or more of the followingadvantages as compared to BSF contacts 106 (FIG. 1A): (i) higherelectric field at the junction, (ii) better surface passivation ofc-Si:H (402), and (iii) lower contact resistance.

Referring to FIG. 4B, another exemplary IBC HJ photovoltaic cell 450 isshown on a p-type c-Si substrate 152 according to another embodiment. Inthis embodiment, the structure of the cell 450 is the same as thestructure of cell 150 of FIG. 1B, except that emitter contacts 414include an n-type doped crystalline layer 402 instead of the intrinsiclayer 108. The intrinsic layer 108 remains within the BSF contacts 106and is indicated as intrinsic layer 108′. In some embodiments, emittercontacts 414 may include n₊ c-Si:H 402, n₊ a-Si:H 112, TCO 116 and backsurface 118. The emitter contacts 414 provide at least one or more ofthe following advantages as compared to emitter contacts 104 (FIG. 1B):(i) higher electric field at the junction, (ii) better surfacepassivation of c-Si:H (402), and (iii) lower contact resistance.

Referring to FIG. 5A, another exemplary IBC HJ photovoltaic cell 500 isshown on an n-type c-Si substrate 102 according to another embodiment.In this embodiment, the structure of the cell 500 includes a combinationof BSF contacts 404 (shown in FIG. 4A) with emitter contacts 204 (shownin FIG. 2A). As before, the intrinsic layer 108 remains within theemitter contacts 204 and is indicated as intrinsic layer 108′.

Referring to FIG. 5B, another exemplary IBC HJ photovoltaic cell 550 isshown on a p-type c-Si substrate 152 according to another embodiment. Inthis embodiment, the structure of the cell 550 includes a combination ofBSF contacts 214 (shown in FIG. 2B) with emitter contacts 414 (shown inFIG. 4B). As before, the intrinsic layer 108 remains within the BSFcontacts 214 and is indicated as intrinsic layer 108′.

Referring to FIG. 6A, another exemplary IBC HJ photovoltaic cell 600 isshown on an n-type c-Si substrate 102 according to another embodiment.In this embodiment, the structure of the cell 600 includes a combinationof BSF contacts 404 (shown in FIG. 4A) with emitter contacts 304 (shownin FIG. 3A). As before, the intrinsic layer 108 remains within theemitter contacts 304 and is indicated as intrinsic layer 108′.

Referring to FIG. 6B, another exemplary IBC HJ photovoltaic cell 650 isshown on a p-type c-Si substrate 152 according to another embodiment. Inthis embodiment, the structure of the cell 650 includes a combination ofemitter contacts 414 (shown in FIG. 4B) with BSF contacts 314 (shown inFIG. 3B). As before, the intrinsic layer 108 remains within the BSFcontacts 314 and is indicated as intrinsic layer 108′. It should benoted the combinations of features depicted in FIGS. 5A, 5B, 6A and 6B,provide in combination all of the features and advantageous describedfor each emitter contact and/or BSF contact as provided individually. Itshould be further noted that other structures may be employed inaddition to or instead of those illustratively described herein. Forexample, additional layers may be introduced between the layers depictedand different combinations of materials and layers may be employed.

Referring to FIG. 7, experimental results are depicted for determiningan optimum combination of crystalline layer/noncrystalline layerthicknesses for an FSF junction/contact in accordance with the presentprinciples, using photo-conductance decay (PCD) measurements. A teststructure 702 is shown having an FSF contact 704. The FSF contact 704was formed on an n-type CZ c-Si substrate 706 having a 700 micronthickness. The FSF contact 704 includes a crystalline layer 708 and anoncrystalline layer 710. Layers 708 and 710 where n-type doped. Thecrystalline layer 708 included n+c-Si:H, and the noncrystalline layer710 included n+a-Si:H. A bottom contact 712 included the same layers 708and 710, as the top contact 704 to form a symmetrically passivatedstructure for the PCD measurements.

Different combinations of thicknesses for crystalline layer708/noncrystalline layer 710 where formed and tested. The results areshown in a graph 720, which plots effective minority carrier lifetime(ms) versus minority carrier density (cm⁻³). The following thicknessratios were measured: 2.5 nm/5 nm, 5 nm/5 nm, 7.5 nm/5 nm and 10 nm/5nm, all with an activated doping level of 5×10¹⁹ cm³ in the n⁺ c-Si:Hlayer. Of these, the ratio of 7.5 nm/5 nm achieved the longest minoritycarrier lifetime. To achieve the best results, there needs to be abalance between thinner layers (dominated by insufficient interfacialhydrogen) and thicker layers dominated by excessive Auger recombinationin n+c-Si:H).

The FSF contact 704 showed excellent passivation and lower absorptionloss. The lower absorption loss is provided due to the elimination of anintrinsic layer on the FSF contact. In addition, with lower absorptionloss, greater short circuit current and therefore cell efficiency isprovided. Since the n⁺ c-Si:H/c-Si junction is the main determinant ofthe electric field accounting for field-induced passivation at thesurface of the c-Si substrate, the effect of the work function of theARC layer 124 (FIG. 1A) on the field-induced passivation is less of aconcern. This provides greater flexibility in selecting a material forthe ARC layer 124. The portion of the passivation accounted for by thepresence of an electric field at the junction is referred to as“field-induced” passivation, as opposed to “chemical” passivation whichrefers to the saturation of the dangling at the substrate surface, e.g.,by H atoms.

It should also be noted that, in some alternative implementations, thefunctions noted in the blocks of the following block diagrams may occurout of the order noted in the FIG. 8. For example, two blocks shown insuccession may, in fact, be executed substantially concurrently, or theblocks may sometimes be executed in the reverse order, depending uponthe functionality involved. It will also be noted that each block of theblock diagrams and/or flowchart illustration, and combinations of blocksin the block diagrams and/or flowchart illustration, can be implementedby special purpose hardware-based systems that perform the specifiedfunctions or acts, or combinations of special purpose hardware andcomputer instructions.

Referring to FIG. 8, a method for forming a photovoltaic stack isillustratively shown in accordance with exemplary embodiments. In block1002, an interdigitated back contact is formed on a crystallinesubstrate having a first dopant conductivity. The interdigitatedstructure may include any of the structures described above or any otheruseful structure. In block 1004, a front surface field structure isformed on the substrate. In block 1006, the front surface field includesa crystalline layer formed on the substrate. In block 1008, an amorphouslayer is formed on the crystalline layer.

In block 1010, the crystalline layer is formed by epitaxially growingthe crystalline layer on the substrate using a PECVD or HWCVD process attemperatures below 450 degrees Celsius, as described above. Thecrystalline layer and the noncrystalline layer may both be formed usingthis process; however, the process conditions for growing crystallineand non-crystalline layers differ from each other. In addition, thecrystalline layer and the noncrystalline layer may be doped in-situ.

In one embodiment, in block 1012, the crystalline layer and thenoncrystalline layer are doped with dopants having a same dopantconductivity as the substrate. In block 1016, the crystalline layerincludes a thickness less than a diffusion length of minority carriersin the crystalline layer. An ARC layer or the like may be formed of thefront surface field in block 1020. Processing continues with theformation of other structures and the completion of the device in block1022.

Having described preferred embodiments for an interdigitated backcontact heterojunction photovoltaic device (which are intended to beillustrative and not limiting), it is noted that modifications andvariations can be made by persons skilled in the art in light of theabove teachings. It is therefore to be understood that changes may bemade in the particular embodiments disclosed which are within the scopeof the invention as outlined by the appended claims. Having thusdescribed aspects of the invention, with the details and particularityrequired by the patent laws, what is claimed and desired protected byLetters Patent is set forth in the appended claims.

What is claimed is:
 1. A photovoltaic device, comprising: a crystallinesubstrate having a first dopant conductivity; an interdigitated backcontact, the interdigitated back contact including back surface fieldstacks and emitter stacks; and a front surface field structurecomprising a crystalline layer formed on the substrate and an amorphouslayer formed on the crystalline layer, the crystalline layer and thenoncrystalline layer being doped with dopants having a same dopantconductivity as the substrate; wherein the back surface field stacks andthe emitter stacks alternate and each of the back surface field stacksand the emitter stacks includes an intrinsic layer formed on theinterdigitated back contact.
 2. The device as recited in claim 1,wherein the crystalline substrate includes silicon, and the crystallinelayer and the noncrystalline layer include hydrogenated silicon having5-40 atomic percent hydrogen.
 3. The device as recited in claim 1,wherein the crystalline layer includes an active doping level higherthan an active doping density of the substrate.
 4. The device as recitedin claim 1, wherein the crystalline layer includes a thickness less thana diffusion length of minority carriers in the crystalline layer.
 5. Thedevice as recited in claim 1, wherein one of the back surface fieldstacks and the emitter stacks includes: an n-doped noncrystalline layerformed on the intrinsic layer, and a first transparent electrode formedon then-doped noncrystalline layer; and the other of the back surfacefield stacks and the emitter stacks includes: a p-doped noncrystallinelayer formed on the intrinsic layer, and a second transparent electrodespaced apart from the first transparent electrode and formed on thep-doped noncrystalline layer.
 6. The device as recited in claim 5,further comprising a p-doped interlayer formed between the p-dopednoncrystalline layer and the first transparent electrode.
 7. The deviceas recited in claim 6, wherein the p-doped noncrystalline layer includeshydrogenated Si and the p-doped interlayer includes hydrogenated Ge. 8.The device as recited in claim 6, wherein the p-doped noncrystallinelayer and the second p-doped noncrystalline layer include hydrogenatedSi and the p-doped interlayer includes hydrogenated Ge.
 9. The device asrecited in claim 5, further comprising a p-doped interlayer formed onthe p-doped noncrystalline layer and a second p-doped noncrystallinelayer formed from a same material as the p-doped noncrystalline layerformed on the p-doped interlayer.